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SST – Spray Solvent Tool

Applications for solvent cleaning, resist strip and developing processes are performed highly efficiently including rinsing and drying. RENA spray batch system is designed for solvents. Different types of solvent can be combined in one chamber; this offers great potential for efficiency and process optimization. No direct contact to solvents by operator, this makes the process safe.

Features and Benefits

  • Reduced medium consumption
  • Optimized footprint
  • Single or dual cassette handling
  • Highly serviceable, easy access
  • SECS/GEM Interface Options
  • Flexible and Upgradeable
  • Improved operator user safety
  • New Auto door Design
  • New Cabinet Design
  • 10 Nozzle chamber
  • Characterized spray manifolds for uniform coverage
  • Externally heated tanks
  • Tool in the lab for process demonstration
  • Low DI water usage
  • Low exhaust requirements (125 scfm at 1″ water)
  • Low chemical usage in reclaim mode
  • Lowest Cost Spray Solvent Tool on the Market
  • 2,4,6 and 8 Tank Options
  • 23 Liter Tanks with Full Sensor Set at 18 liters
  • Fresh and Reclaim Chemical Tanks
  • Closed System for Containing Chemical Vapors
  • Chemical Recirculation and Reclaim
  • Precision Designed and Balanced Rotors
  • Reliable, Low Maintenance Design
  • Spray Solvent Tools have been the Industry Standard for Photo Resist Stripping for Three Decades
  • Unmatched Dependability and Ease of Maintenance
  • Guaranteed uptime of 95%
  • MTBF >400 Hours
  • MTTR< 4 Hours
  • Options: Chemical Concentration Monitoring , Chemical Delivery – Bottle fill from CDU, Manual Funnel Fill, Waste Carboys

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Phone : +49 7723 9313-0