Batch spray tools for semiconductor acid and solvent applications

In semiconductor manufacturing, spray tools can be utilized for wide range of surface preparation processes, both in front-end-of-line (FEOL) and back-end-of-line (BEOL) applications to fabricate MEMS sensors and actuators, LEDs, power and RF ICs. To perform wet etching, critical cleaning, resist stripping and polymer removal with outstanding uniformity and yield, RENA offers both spray acid tools (SAT) and spray solvent tools (SST). Our SAT can etch various semiconductors, metals and oxides like silicon (Si) and Gallium-Arsenide (GaAs) with wafer sizes up to 200 mm using 25-wafer cassette.

RENA also offers to remanufacture and upgrade customers Semitools batch sprays to improve the process control and yield and to extend the tool life. The extent of the upgrade varies depending on customer requirements and the chosen upgrade package. Please contact us to acquire further information.