New Expert Blog post: Metal Liftoff in advanced immersion tank

In this study, a new immersion process was developed and evaluated to improve typical problems in existing immersion systems through a carefully designed combination of hardware and process steps.

RENA's FluidJet™ batch wet process system for Metal Liftoff (MLO) achieved a breakthrough by not redepositing metal on the front or back of the wafer and reducing pattern damage with comparable electrical results, while using 80% less chemicals than existing single wafer processing solutions.

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