RENA monoTEX® - moderating and wetting agent

monoTEX®

IPA-free alkaline texturing for mono Si-wafers

monoTEX^® is the best-in-class type of moderating and wetting agent for alkaline texturing. Unlike the common texturing agent IPA, RENA monoTEX^® is non-flamable and operating at temperatures far below the boiling point of its components. It behaves almost linear towards temperature and alkali concentration changes and allows tuning the size of the pyramids by adjusting process parameters.

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Features and benefits

IPA free
Production proven by processing > 1 billion wafers (> 20 GW)
Process temperature below boiling points
No VOC and no handling of EX-risk liquid
Large process window
Short process time, standard alkaline texturing time below 7 min
Uniform pyramids (2 – 5 μm). Size may be varied by recipe
Average reflectance < 12.5 % in a range of 400 – 1100 nm
Linear behaviour towards parameter changes
Cost effective usage of additive
Bath lifetime of > 250 runs with RENA‘s pre-clean
Environmental-friendly by low organic load in waste liquid, biodegradable

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Downloads

Datasheet RENA monoTEX

(807 KB)

数据页 RENA monoTEX-Everest

(2 MB)