Verified production equipment

In the field of solar wafer production, the RENA PreWaClean wet-chemical system is the ideal tool for pre-cleaning of cutted bricks and de-glueing the wafers from them. The high throughput and small footprint are convincing and make the system the perfect solution.

The PreWaClean is the initial step. The wafers, along with the sawing beams, are transported wet into the loading ports. The optimized spray nozzle design cleans any potential particles, which are generated during the sawing step. Perfectly cleaned wafers are guaranteed by precise chemical dosing. Wafers are separated from the sawing beam, any adhesive residue will be cleaned and transported in the de-gluing procedure, which is carried out in the following process tank. . The improved hole pipe design provides direct flow to the glue, resulting in excellent throughput. The system is based on the wet-in-wet-out system. 

The perfect interplay results from the following tool for wafer singulation and the direct link with the final cleaning step with the BatchWaClean

The BatchWaClean consists of an alkaline cleaning step, final ozone-based organic cleaning, and drying. This guarantees perfect interaction between the RENA wet-chemical systems and guarantees unique process results at the best costs of ownership.

Features and Benefits

  • High tool capacity
  • High uptime
  • Up to G13 wafer size
  • O3 Clean
  • Waste and water saving as options
  • Optimized spray nozzle design
  • Ultrasonic cleaning for optimized cleaning
  • Optimized degluing process to shorten the process time
  • Small footprint in relation to throughput

PreWaClean

Michael Vees Sales Director Solar
Sales Director Solar
Michael Vees