Verified production equipment
In the field of solar wafer production, the RENA PreWaClean wet-chemical system is the ideal tool for pre-cleaning of cutted bricks and de-glueing the wafers from them. The high throughput and small footprint are convincing and make the system the perfect solution.
The PreWaClean is the initial step. The wafers, along with the sawing beams, are transported wet into the loading ports. The optimized spray nozzle design cleans any potential particles, which are generated during the sawing step. Perfectly cleaned wafers are guaranteed by precise chemical dosing. Wafers are separated from the sawing beam, any adhesive residue will be cleaned and transported in the de-gluing procedure, which is carried out in the following process tank. . The improved hole pipe design provides direct flow to the glue, resulting in excellent throughput. The system is based on the wet-in-wet-out system.
The perfect interplay results from the following tool for wafer singulation and the direct link with the final cleaning step with the BatchWaClean.
The BatchWaClean consists of an alkaline cleaning step, final ozone-based organic cleaning, and drying. This guarantees perfect interaction between the RENA wet-chemical systems and guarantees unique process results at the best costs of ownership.