Vanguard - Modular Single Wafer Cleaning

Vanguard is a fully-automated, single-wafer system for wet chemical cleaning, rinsing, etching and drying of 300mm wafers. Its modular, scalable design ensures optimal adaptability in throughput, footprint, and application needs. Featuring advanced chemical cleaning technologies, it delivers superior defect removal, increased process flexibility, and reduced chemical consumption—all with exceptional serviceability.

Features and Benefits

  • 4 - 8 chamber single wafer cleaning
  • Internal chemistry preparation
  • Fully GEM300 compatible
  • Minimal chemical usage
  • Class 1 mini environment
  • Double-sided cleaning, up to 5 chemicals
  • Compact system footprint
  • Advanced IPA/DI water drying
Theo-Moissidis-Head-of-Sales
VP Sales
Theo Moissidis
ResponsibleResponsible for the following countries:
Worldwide