Vanguard - Modular Single Wafer Cleaning
Vanguard is a fully-automated, single-wafer system for wet chemical cleaning, rinsing, etching and drying of 300mm wafers. Its modular, scalable design ensures optimal adaptability in throughput, footprint, and application needs. Featuring advanced chemical cleaning technologies, it delivers superior defect removal, increased process flexibility, and reduced chemical consumption—all with exceptional serviceability.