TOPCon Solar Cell Production
High-efficiency TOPCon solar cells are produced using RENA Fast Etch Technology to achieve ultra-high manufacturing throughput. High quality RENA tools offer high uptime and long bath lifetime due to the feed and bleed function. Several steps are necessary for flawless and high-quality TOPCon solar cell production, including texturing, etching, and cleaning processes using innovative RENA TOPCon production equipment.
The fully automated Batch N platform accommodates alkaline and acidic processes in one tool. Texturing and saw damage removal are performed by the BatchTex N600, combined with cleaning steps.
RENA's BSG Etch Cluster ensures ultra-fast removal of silicon oxide (SiO2) and doped glasses. Utilizing the InEtchSide 4 inline platform and the BatchEtch, emitter etching and cleaning. PSG Cluster includes the InEtchSide 4 as well, combined with the BatchPolyClean which manages batch-type poly-Si etching with high-efficiency cleaning. This is the premier solution for high-efficient TOPCon PV cell production.
Benefits:
- Approved highest cell efficiencies η > 24,5%, Voc > 710 mV
- 100 % HNO3 free
- Best performance in CoO
- Outstanding productivity and uptime
- Batch N600 platform for throughput more than 1 GW per line
- Poly-Si wrap around removal and shunt etch for all poly-Si layers (LPCVD, PECVD, PVD)